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Abstract: This paper summarizes the vortex oil-free vacuum pump technology development and status quo, including the development of vortex technology to vortex technology in various industries; vortex oil-free vacuum pump principle to vortex oil-free vacuum pump Manufacturing technology and technical indicators; scroll vortex vacuum pump from the development of all countries in the world to our vortex vacuum pump development status of the vortex oil-free vacuum pump conditions have a systematic introduction.
1 Introduction
The concept of vortex has been quite long ago. At the beginning of the 20th century, the world already had the patent of vortex technology. However, because of the technical limitations at that time, the vortex mechanism could not be manufactured and the vortex concept was forgotten. The scroll mechanism was reintroduced in 1973 and the first model agency was created, making the practical application of this technology possible. Vortex institutions of high reliability, smooth operation, low noise, energy saving potential and great advantages immediately caused the refrigerator industry attention and urgent needs, greatly favored by the industry leader, was quickly put into industrial applications. Scroll compressor technology and products of well-known companies such as Trance, Hitachi and Copland have led the tide of practical application of vortex technology in the world, which has led to technological progress and product upgrading in many industries such as refrigerators and air conditioners.
Today, the vortex technology has been promoted to the vacuum pump manufacturing industry from the initial application in the compressor industry, and has realized the practical application of the vortex clean vacuum obtaining technology of no oil, steadier operation, lower noise and more energy saving. People apply the concept and principle of vortex to manufacture the single-stage and two-stage vortex oil-free vacuum pump products that have no pollution to the vacuum application equipment and environment, and have the indexes such as pumping speed, life expectancy and energy consumption superior to ordinary oil pump.
In the early 90s of last century, the world's first scroll vacuum pump to market, scroll technology thus began as a new type of vacuum access technology is being promoted around the world. So far, the world's vortex vacuum pump manufacturer focused on the United States, Japan and Europe, Japan's Anest 1wata, the United States Varian, Germany Bush as the representative. Products include since 0.25L / S-1OL / S series of products, some 15L / S or more products are also pumping the pilot phase.
2 vortex oil-free vacuum pump (0-I free scroll vacuum pump) the characteristics and application areas
A clean vacuum has long been the ideal vacuum for both scientists and business. Since the beginning to create a vacuum environment, people try to use different means to achieve the effect of cleaning the vacuum. Today, clean vacuum equipment has been developed to a variety of products such as condensate pump, column race pump, claw pump, scroll pump and diaphragm pump. Among the existing oil-free vacuum pumps, the vortex oil-free vacuum pump has the characteristics of stable operation, low noise, energy saving, light weight and small volume as compared with other types of oil-free vacuum pumps and has been widely applied to the following scientific research And the production areas: ①semiconductor industry - thin film preparation equipment, semiconductor device packaging equipment; ② vacuum metallurgy industry - vacuum furnace, nanomaterials preparation equipment, vacuum testing equipment; ③ Scientific Instruments Industry - Synchrotron radiation beam lines, electron microscopes, Analysis and testing equipment; ④ medical equipment - dental equipment, dialysis machines; ⑤ biological products industry - material purification, pharmaceutical preparation; ⑥ packaging industry - food, pharmaceuticals, biological products and other packaging equipment.
3 scroll oil-free vacuum pump working principle, technical indicators and compared with the ordinary pump
Scroll oil-free vacuum pump scroll is one end connected to a plane with one or several involute spiral to form a scroll disc structure. A pair of scrolls consisting of a fixed scroll and an orbiting scroll form the basic suction mechanism for a scrollless oilless vacuum. For example, in a two-stage vortexless oil-free vacuum pump, there are two directions of a fixed scroll and a orbiting scroll between two scroll plates. Dynamic and fixed vortex scroll to form a relatively constant volume of crescent-shaped vacuum chamber so that gas suction from the suction port, the exhaust port discharge to complete the exhaust cycle.
As we all know, oil-free scroll vacuum pump (Oil free scrolI vacuum pump) compared with the ordinary oil vacuum pump has significant features. The following rotary vane vacuum pump to illustrate the difference:
Table 1 vortex oil-free vacuum pump with ordinary rotary vane vacuum pump technical indicators of the comparison
Technical Specifications Rotary vane oil vacuum pump vortex oil-free vacuum pumping speed (l / s) 2.0,4.0,8 2.0,4.4,8.7
Ultimate vacuum (Pa) 0.6 1.0
Service life (h)
Overhaul interval (h) 8000 10000
Cooling Medium Oil Air Noise (dB) 75 60
Quality (kg) 70 41
Number of motor phases 3 1
Voltage (V) 220/380 220
Power (kw) 1.1 0.6
Number of revolutions (r / min) 1400 1437
4 Vortex oil-free vacuum pump advantages and its problems to the user
4.1 vortex oil-free vacuum pump superior performance
Vortex vacuum pump is the main advantage of the gap Xiao, less leakage, with a higher compression ratio, in a wide range of force with a stable pumping speed, wide range of working pressure; due to changes in the volume of the compression chamber city continuous, and thus Small changes in drive torque, small power changes, low vibration and noise, high reliability. This is not available with other types of dry vacuum pumps.
4.2 vortex oil-free vacuum pump to solve the basis of pollution and vibration, common problems
As the ordinary rotary vane pump oil spills, noise, oil pollution, high energy consumption and vibration and other issues to users adversely affected, such as the biological products industry and the semiconductor industry, oil vapor pollution and process system return valve title. Vacuum coating equipment coating process, coating under 20 ~ 40Pa vacuum conditions, if the application of ordinary rotary vane vacuum pump as a pre-stage equipment will cause pollution on the coating process equipment, affecting the amount of film. The semiconductor wafer manufacturing process which uses the pump compared with the use of dry pump, the yield rate of 509l left the gap between the left and the oil mist emitted steam pollution of the environment. In the scientific instrumentation industry, especially in the analytical instrumentation industry, the use of a pump will adversely affect the test results. Large synchrotron radiation beam line on the mining with vortex oil-free vacuum pump as a front-stage vacuum pump role is quite obvious. In addition vortex oil-free vacuum pump consumption in addition to ordinary oil pump to the user to bring the environmental pollution and annoyance.
4.3 scroll oil-free vacuum pump system manufacturing and operating costs
In order to prevent the ordinary rotary vane vacuum pump oil on the vacuum system of oil pollution, the need to add cold trap in the extraction system to capture oil molecules; system operation process also need regular cleaning degreasing; and some need to regularly replace the vacuum pump oil. The first use of vortex oil-free vacuum pump does not need to add cold trap and the like oil catching mechanism, the second does not need to change the vacuum pump oil, the third vibration smaller, more stable operation, the fourth energy consumption is reduced, the fifth weight lighter, Six breakthrough in the use of the pump limits, the advantages of the vortex oil-free vacuum pump to become common rotary vane vacuum pump replacement products.
5 concluding remarks
Domestic manufacturing processes represented by the semiconductor and electronics industries and the scientific research and analytical testing industry urgently require clean, oil-free vacuum environments, but clean vacuum access equipment such as condensate pump, column pump, claw pump, scroll pump and Diaphragm pumps currently do not have a reliable and advanced batch of domestic products. Import vortex oil-free vacuum pump as a formal launch in China market no more than 3 years of new products, due to the price of the article mentioned earlier, the market development and user awareness and other reasons, did not form a virtuous circle. In this way, on the one hand, the urgent market demand, on the other hand, there is no suitable product in terms of both price and technology, resulting in a huge market gap.
There is no doubt affordable, reliable performance of the vortex oil-free vacuum pump will become the mainstream of products for the Chinese market, vigorously develop the rotary oil-free vacuum pump is imperative. The development of the Vortex Series and other oil-free vacuum pumps that meet the requirements of the Chinese market and their testing techniques have also become an opportunity for the vacuum industry in China to further develop.
In order to solve the basic and common problems existing in scientific research, new materials, and semiconductor industries in our country, experts in the industry have continuously introduced the technology of vortex oil-free vacuum pump and its development status in recent years. Foreign vortex oil-free Vacuum pump manufacturers and agents on the Chinese market to make its sales in the Chinese market is growing year by year. Relevant domestic enterprises in the vacuum industry also carried out basic, applied research and small-scale trial production of vortex oil-free vacuum pump and other stages of exploration, but due to technical basis, incentive mechanisms, research and development tools, capital constraints, research and development work is not very fast . Product quality, stability and reliability, and technology promotion and market development planning, principles, tools, etc. are also problems. Therefore, vortex oil-free vacuum pump next step industrialization of technology research and development and market development is an enterprise must solve two major issues. With the development of means, capital investment, market development to solve the problem, vortex oil-free vacuum pump will open the market, thereby enhancing the vacuum access to the industry's technical level. Successful vortex oil-free vacuum pump product development and market development model will also be other clean vacuum access to our equipment such as condensate pump, like Zhai Lei, claw covered with æ®› diaphragm pumps provide an effective reference.